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| 工程技术 4区 |
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Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.
Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society. 2008;26(6):2168-2173. DOI:10.1116/1.3013329
Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society. 2008;26(1):L13-L18. DOI:10.1116/1.2830634
Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society. 2009 Nov 1;27(6):3088-3091. DOI:10.1116/1.3259953
Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society. 2008 Nov 1;26(6):2549-2553. DOI:10.1116/1.3013424
Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society. 2009 Dec 4;27(6):3099-3103. DOI:10.1116/1.3264675
《JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B》发布于爱科学网，并永久归类相关SCI期刊导航类别中，本站只是硬性分析 "《J VAC SCI TECHNOL B》" 杂志的可信度。学术期刊真正的价值在于它是否能为科技进步及社会发展带来积极促进作用。"《J VAC SCI TECHNOL B》" 的价值还取决于各种因素的综合分析。
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